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- 00112102 contributor B75961.
- 00112102 contributor B75962.
- 00112102 contributor B75963.
- 00112102 created "c2001.".
- 00112102 date "2001".
- 00112102 date "c2001.".
- 00112102 dateCopyrighted "c2001.".
- 00112102 description "Includes bibliographical references and indexes.".
- 00112102 extent "xiii, 614 p. :".
- 00112102 identifier "1566773083".
- 00112102 identifier "9781566773089".
- 00112102 isPartOf "Proceedings (Electrochemical Society) ; v. 2001-2.".
- 00112102 isPartOf "Proceedings ; v. 2001-2".
- 00112102 issued "2001".
- 00112102 issued "c2001.".
- 00112102 language "eng".
- 00112102 publisher "Pennington, NJ : Electrochemical Society,".
- 00112102 subject "Integrated circuits Ultra large scale integration Congresses.".
- 00112102 subject "TK7874.76 .I575 2001".
- 00112102 title "ULSI process integration II : proceedings of the international symposium / editors, C.L. Claeys ... [et al.].".
- 00112102 type "text".