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- 00265539 alternative "Optical microlithography twelve".
- 00265539 contributor B81171.
- 00265539 contributor B81172.
- 00265539 created "c1999.".
- 00265539 date "1999".
- 00265539 date "c1999.".
- 00265539 dateCopyrighted "c1999.".
- 00265539 description "Includes bibliographical references and author index.".
- 00265539 extent "2 v. (xv, 547-1182 p.) :".
- 00265539 identifier "0819431532".
- 00265539 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3334.".
- 00265539 isPartOf "SPIE proceedings series ; v. 3679".
- 00265539 issued "1999".
- 00265539 issued "c1999.".
- 00265539 language "eng".
- 00265539 publisher "Bellingham, Wash. : SPIE,".
- 00265539 subject "621.3815/31 21".
- 00265539 subject "Integrated circuits Masks Congresses.".
- 00265539 subject "Manufacturing processes Congresses.".
- 00265539 subject "Microlithography Congresses.".
- 00265539 subject "TK7872.M3 O6823 1999".
- 00265539 subject "X-ray lithography Congresses.".
- 00265539 title "Optical microlithography XII : 17-19 March, 1999, Santa Clara, California / Luc Van den Hove, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.".
- 00265539 title "Optical microlithography twelve".
- 00265539 type "text".