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- 00266007 alternative "Multilevel interconnect technology 3".
- 00266007 alternative "Multilevel interconnect technology three".
- 00266007 contributor B81652.
- 00266007 contributor B81653.
- 00266007 created "c1999.".
- 00266007 date "1999".
- 00266007 date "c1999.".
- 00266007 dateCopyrighted "c1999.".
- 00266007 description "Includes bibliographical references and index.".
- 00266007 extent "ix, 184 p. :".
- 00266007 identifier "0819434809".
- 00266007 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3883.".
- 00266007 isPartOf "SPIE proceedings series ; v. 3883".
- 00266007 issued "1999".
- 00266007 issued "c1999.".
- 00266007 language "eng".
- 00266007 publisher "Bellingham, Wash., USA : SPIE,".
- 00266007 subject "621.39/5 21".
- 00266007 subject "Dielectric films Congresses.".
- 00266007 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 00266007 subject "Metallizing Congresses.".
- 00266007 subject "Plasma etching Congresses.".
- 00266007 subject "TK7874.75 .M86 1999".
- 00266007 title "Multilevel interconnect technology 3".
- 00266007 title "Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California / Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.].".
- 00266007 title "Multilevel interconnect technology three".
- 00266007 type "text".