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- 00266008 contributor B81654.
- 00266008 contributor B81655.
- 00266008 created "c1999.".
- 00266008 date "1999".
- 00266008 date "c1999.".
- 00266008 dateCopyrighted "c1999.".
- 00266008 description "Includes bibliographic references and author index.".
- 00266008 extent "x, 434 p. :".
- 00266008 identifier "081943471X".
- 00266008 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3874.".
- 00266008 isPartOf "SPIE proceedings series ; v. 3874".
- 00266008 issued "1999".
- 00266008 issued "c1999.".
- 00266008 language "eng".
- 00266008 publisher "Bellingham, Washington : SPIE,".
- 00266008 subject "621.3815/2 21".
- 00266008 subject "Electromechanical devices Design and construction Congresses.".
- 00266008 subject "Microfabrication Congresses.".
- 00266008 subject "Micromachining Congresses.".
- 00266008 subject "TJ1191.5 .M5524 1999".
- 00266008 title "Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California / James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].".
- 00266008 type "text".