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- 00266340 alternative "Smart electronics and MEMS".
- 00266340 contributor B82027.
- 00266340 contributor B82028.
- 00266340 created "c1999.".
- 00266340 date "1999".
- 00266340 date "c1999.".
- 00266340 dateCopyrighted "c1999.".
- 00266340 description "Includes bibliographical references and index.".
- 00266340 extent "viii, 382 p. :".
- 00266340 identifier "0819431478".
- 00266340 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3673.".
- 00266340 isPartOf "SPIE proceedings series ; v. 3673".
- 00266340 issued "1999".
- 00266340 issued "c1999.".
- 00266340 language "eng".
- 00266340 publisher "Bellingham, Wash., USA : SPIE,".
- 00266340 subject "621.381 21".
- 00266340 subject "Actuators Congresses.".
- 00266340 subject "Microelectromechanical systems Congresses.".
- 00266340 subject "Microelectronics Materials Congresses.".
- 00266340 subject "Smart materials Congresses.".
- 00266340 subject "TK7874 .S59 1999".
- 00266340 title "Smart electronics and MEMS".
- 00266340 title "Smart structures and materials 1999. Smart electronics and MEMS : 1-3 March 1999, Newport Beach, California / Vijay K. Varadan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by SEM--Society for Experimental Mechanics ... [et al.] ; cooperating organizations, Air Force Research Laboratory, the Ceramic Society of Japan, [and] Intelligent Materials Forum (Japan).".
- 00266340 type "text".