Matches in Library of Congress for { <http://lccn.loc.gov/00266414> ?p ?o. }
Showing items 1 to 23 of
23
with 100 items per page.
- 00266414 contributor B82116.
- 00266414 contributor B82117.
- 00266414 created "c1999.".
- 00266414 date "1999".
- 00266414 date "c1999.".
- 00266414 dateCopyrighted "c1999.".
- 00266414 description "Includes bibliographic references and author index.".
- 00266414 extent "vii, 206 p. :".
- 00266414 identifier "0819432229".
- 00266414 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 3742".
- 00266414 isPartOf "Proceedings EurOpt series".
- 00266414 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3742.".
- 00266414 issued "1999".
- 00266414 issued "c1999.".
- 00266414 language "eng".
- 00266414 publisher "Bellingham, Wash., USA : SPIE,".
- 00266414 subject "621.381 21".
- 00266414 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 00266414 subject "Microelectronics Materials Congresses.".
- 00266414 subject "Microelectronics industry Production control Congresses.".
- 00266414 subject "TK7836 .P72 1999".
- 00266414 title "Process and equipment control in microelectronic manufacturing : 19-20 May, 1999, Edinburgh, Scotland / Kevin Yallup, Murali K. Narasimhan, chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers.".
- 00266414 type "text".