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- 00266575 contributor B82312.
- 00266575 contributor B82313.
- 00266575 created "c1999.".
- 00266575 date "1999".
- 00266575 date "c1999.".
- 00266575 dateCopyrighted "c1999.".
- 00266575 description "Includes bibliographical references and index.".
- 00266575 extent "vi, 176 p. :".
- 00266575 identifier "0819434779".
- 00266575 isPartOf "Proceedings of SPIE, 0277-786X ; v. 3880".
- 00266575 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3880.".
- 00266575 issued "1999".
- 00266575 issued "c1999.".
- 00266575 language "eng".
- 00266575 publisher "Bellingham, Washington : SPIE,".
- 00266575 subject "621.381 21".
- 00266575 subject "Microelectromechanical systems Reliability Congresses.".
- 00266575 subject "TK7875 .M46 1999".
- 00266575 title "MEMS reliability for critical and space applications : 21-22 September, 1999, Santa Clara, California / Russell A. Lawton ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology ... [et al.].".
- 00266575 type "text".