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- 00267081 contributor B82964.
- 00267081 contributor B82965.
- 00267081 created "c1999.".
- 00267081 date "1999".
- 00267081 date "c1999.".
- 00267081 dateCopyrighted "c1999.".
- 00267081 description "Includes bibliographical references and index.".
- 00267081 extent "xi, 534 p. :".
- 00267081 identifier "0819430889".
- 00267081 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3618.".
- 00267081 isPartOf "SPIE proceedings series ; v. 3618".
- 00267081 issued "1999".
- 00267081 issued "c1999.".
- 00267081 language "eng".
- 00267081 publisher "Bellingham, Wash., USA : SPIE,".
- 00267081 subject "621.381 21".
- 00267081 subject "Laser ablation Congresses.".
- 00267081 subject "Lasers Industrial applications Congresses.".
- 00267081 subject "Manufacturing processes Congresses.".
- 00267081 subject "Microelectronics industry Equipment and supplies Congresses.".
- 00267081 subject "Optoelectronic devices Design and construction Congresses.".
- 00267081 subject "TK7836 .L38 1999".
- 00267081 title "Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California / Jan J. Dubowski ... [et al.], chairs/editors ; sponsored by AFSOR [i.e. AFOSR]--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering.".
- 00267081 type "text".