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- 00267570 contributor B83527.
- 00267570 contributor B83528.
- 00267570 created "c1999.".
- 00267570 date "1999".
- 00267570 date "c1999.".
- 00267570 dateCopyrighted "c1999.".
- 00267570 description "Includes bibliographical references and index.".
- 00267570 extent "viii, 428 p. :".
- 00267570 identifier "0819434922".
- 00267570 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3891.".
- 00267570 isPartOf "SPIE proceedings series ; v. 3891".
- 00267570 issued "1999".
- 00267570 issued "c1999.".
- 00267570 language "eng".
- 00267570 publisher "Bellingham, Wash., USA : SPIE,".
- 00267570 subject "621.381 21".
- 00267570 subject "Microelectromechanical systems Congresses.".
- 00267570 subject "Microelectronics Congresses.".
- 00267570 subject "Smart structures Congresses.".
- 00267570 subject "TK7875 .E43 1999".
- 00267570 title "Electronics and structures for MEMS : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.].".
- 00267570 type "text".