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- 00267602 alternative "Miniaturized systems with micro-optics and micromechanics.".
- 00267602 contributor B83569.
- 00267602 contributor B83570.
- 00267602 created "c1999.".
- 00267602 date "1999".
- 00267602 date "c1999.".
- 00267602 dateCopyrighted "c1999.".
- 00267602 description "Includes bibliographical references and index.".
- 00267602 extent "viii, 426 p. :".
- 00267602 identifier "0819434752".
- 00267602 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3878.".
- 00267602 isPartOf "SPIE proceedings series ; v. 3878".
- 00267602 issued "1999".
- 00267602 issued "c1999.".
- 00267602 language "eng".
- 00267602 publisher "Bellingham, Wash., USA : SPIE,".
- 00267602 subject "621.36/93 21".
- 00267602 subject "Integrated optics Congresses.".
- 00267602 subject "Microelectromechanical systems Congresses.".
- 00267602 subject "Micromechanics Congresses.".
- 00267602 subject "Miniature electronic equipment Congresses.".
- 00267602 subject "Optical scanners Congresses.".
- 00267602 subject "TA1660 .M567 1999".
- 00267602 title "Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California / M.E. Motamedi, Rolf Goering, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].".
- 00267602 type "text".