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- 00267603 alternative "Micromachined devices and components 5".
- 00267603 alternative "Micromachined devices and components five".
- 00267603 contributor B83571.
- 00267603 contributor B83572.
- 00267603 created "c1999.".
- 00267603 date "1999".
- 00267603 date "c1999.".
- 00267603 dateCopyrighted "c1999.".
- 00267603 description "Includes bibliographical references and index.".
- 00267603 extent "ix, 304 p. :".
- 00267603 identifier "0819434736".
- 00267603 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3876.".
- 00267603 isPartOf "SPIE proceedings series ; v. 3876".
- 00267603 issued "1999".
- 00267603 issued "c1999.".
- 00267603 language "eng".
- 00267603 publisher "Bellingham, Wash., USA : SPIE,".
- 00267603 subject "620/.5 21".
- 00267603 subject "Electromechanical devices Congresses.".
- 00267603 subject "Micromachining Congresses.".
- 00267603 subject "Micromechanics Congresses.".
- 00267603 subject "TJ163 .M485 1999".
- 00267603 title "Micromachined devices and components 5".
- 00267603 title "Micromachined devices and components V : 20-21 September 1999, Santa Clara, California / Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].".
- 00267603 title "Micromachined devices and components five".
- 00267603 type "text".