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- 00268121 alternative "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 00268121 alternative "Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 00268121 alternative "Mask technology for integrated circuits and microcomponents".
- 00268121 contributor B84232.
- 00268121 contributor B84233.
- 00268121 contributor B84234.
- 00268121 created "c1999.".
- 00268121 date "1999".
- 00268121 date "c1999.".
- 00268121 dateCopyrighted "c1999.".
- 00268121 description "Includes bibliographical references and index.".
- 00268121 extent "ix, 180 p. :".
- 00268121 identifier "0819431397".
- 00268121 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3665.".
- 00268121 isPartOf "SPIE proceedings series ; v. 3665".
- 00268121 issued "1999".
- 00268121 issued "c1999.".
- 00268121 language "eng".
- 00268121 publisher "Bellingham, Wash., USA : SPIE,".
- 00268121 subject "621.3815 21".
- 00268121 subject "Integrated circuits Masks Congresses.".
- 00268121 subject "Microlithography Congresses.".
- 00268121 subject "TK7872.M3 E97 1998".
- 00268121 subject "X-ray lithography Congresses.".
- 00268121 title "15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany / Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), [and] SPIE--the International Society for Optical Engineering.".
- 00268121 title "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 00268121 title "Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 00268121 title "Mask technology for integrated circuits and microcomponents".
- 00268121 type "text".