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- 00465007 contributor B246789.
- 00465007 created "2000.".
- 00465007 date "2000".
- 00465007 date "2000.".
- 00465007 dateCopyrighted "2000.".
- 00465007 description "Includes bibliographical references (p. 97-102).".
- 00465007 extent "103 p. :".
- 00465007 identifier "3896495836".
- 00465007 isPartOf "Series in microelectronics ; v. 97".
- 00465007 issued "2000".
- 00465007 issued "2000.".
- 00465007 language "eng".
- 00465007 publisher "Konstanz : Hartung-Gorre,".
- 00465007 subject "621.3815/2 21".
- 00465007 subject "Finite element method.".
- 00465007 subject "Semiconductors Design and construction Computer simulation.".
- 00465007 subject "TK7871.85 .V543 2000".
- 00465007 title "Mesh generation algorithms for three-dimensional semiconductor process simulation / Luis Villablanca.".
- 00465007 type "text".