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- 00501398 contributor B249926.
- 00501398 contributor B249927.
- 00501398 created "c1999.".
- 00501398 date "1999".
- 00501398 date "c1999.".
- 00501398 dateCopyrighted "c1999.".
- 00501398 description "Includes bibliographical references and index.".
- 00501398 extent "x, 512 p. :".
- 00501398 identifier "0819434949".
- 00501398 isPartOf "Proceedings of SPIE, 0277-786X ; v. 3893".
- 00501398 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3893.".
- 00501398 issued "1999".
- 00501398 issued "c1999.".
- 00501398 language "eng".
- 00501398 publisher "Bellingham, Wash. : SPIE,".
- 00501398 subject "621.381 21".
- 00501398 subject "Microelectromechanical systems Design and construction Congresses.".
- 00501398 subject "Microelectronic packaging Congresses.".
- 00501398 subject "TK7875 .D465 1999".
- 00501398 title "Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia).".
- 00501398 type "text".