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- 00502114 contributor B250688.
- 00502114 contributor B250689.
- 00502114 created "c1999.".
- 00502114 date "1999".
- 00502114 date "c1999.".
- 00502114 dateCopyrighted "c1999.".
- 00502114 description "Includes bibliographical references and index.".
- 00502114 extent "vii, 262 p. :".
- 00502114 identifier "0819432210".
- 00502114 isPartOf "Proceedings EurOpt series".
- 00502114 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering.".
- 00502114 isPartOf "SPIE proceedings series, 0277-786X v. 3741".
- 00502114 issued "1999".
- 00502114 issued "c1999.".
- 00502114 language "eng".
- 00502114 publisher "Bellingham, Wash., USA : SPIE,".
- 00502114 subject "621.3815/2 21".
- 00502114 subject "Integrated circuits Design and construction Congresses.".
- 00502114 subject "Microlithography Congresses.".
- 00502114 subject "Semiconductors Etching Congresses.".
- 00502114 subject "TK7874 .L56 1999".
- 00502114 title "Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland / Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored by EOS--European OPtical Society ... [et al.].".
- 00502114 type "text".