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- 00689203 contributor B274929.
- 00689203 contributor B274930.
- 00689203 created "c1999.".
- 00689203 date "1999".
- 00689203 date "c1999.".
- 00689203 dateCopyrighted "c1999.".
- 00689203 description "Includes bibliographical references and index.".
- 00689203 extent "2 v. (xix, 1192 p.) :".
- 00689203 identifier "0819431540".
- 00689203 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3680.".
- 00689203 isPartOf "SPIE proceedings series ; v. 3680".
- 00689203 issued "1999".
- 00689203 issued "c1999.".
- 00689203 language "eng".
- 00689203 publisher "Bellingham, Wash., USA : SPIE".
- 00689203 subject "621.381 21".
- 00689203 subject "Microelectromechanical systems Congresses.".
- 00689203 subject "TK7875 .D47 1999".
- 00689203 title "Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France / Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et. al].".
- 00689203 type "text".