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- 00698347 contributor B284595.
- 00698347 contributor B284596.
- 00698347 created "c1999.".
- 00698347 date "1999".
- 00698347 date "c1999.".
- 00698347 dateCopyrighted "c1999.".
- 00698347 description "Includes bibliographical references and index.".
- 00698347 extent "ix, 334 p. :".
- 00698347 identifier "0819434817".
- 00698347 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3884.".
- 00698347 isPartOf "SPIE proceedings series ; v. 3884".
- 00698347 issued "1999".
- 00698347 issued "c1999.".
- 00698347 language "eng".
- 00698347 publisher "Bellingham, Wash., USA : SPIE,".
- 00698347 subject "621.3815/2 21".
- 00698347 subject "Integrated circuits Design and construction Congresses.".
- 00698347 subject "Manufacturing processes Congresses.".
- 00698347 subject "Optical pattern recognition Industrial applications Congresses.".
- 00698347 subject "Semiconductors Design and construction Congresses.".
- 00698347 subject "TK7871.85 .I486 1999".
- 00698347 title "In-line methods and monitors for process and yield improvement : 22-23 September 1999, Santa Clara, California / Sergio Ajuria, Jerome F. Jakubczak, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.].".
- 00698347 type "text".