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- 00702708 contributor B287837.
- 00702708 contributor B287838.
- 00702708 created "c1999.".
- 00702708 date "1999".
- 00702708 date "c1999.".
- 00702708 dateCopyrighted "c1999.".
- 00702708 description "Includes bibliographical references and index.".
- 00702708 extent "v, 178 p. :".
- 00702708 identifier "0819434957".
- 00702708 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3894.".
- 00702708 isPartOf "SPIE proceedings series ; v. 3894".
- 00702708 issued "1999".
- 00702708 issued "c1999.".
- 00702708 language "eng".
- 00702708 publisher "Bellingham, Wash., USA : SPIE,".
- 00702708 subject "621.381 21".
- 00702708 subject "Microelectromechanical systems Study and teaching Congresses.".
- 00702708 subject "Microelectronics Congresses.".
- 00702708 subject "Microelectronics Study and teaching Congresses.".
- 00702708 subject "TK7874 .E29 1999".
- 00702708 title "Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia / Fred Payne, Ash M. Parameswaran, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.].".
- 00702708 type "text".