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- 00708570 alternative "Sensors and actuators.".
- 00708570 contributor B289332.
- 00708570 contributor B289333.
- 00708570 contributor B289334.
- 00708570 created "1999.".
- 00708570 date "1999".
- 00708570 date "1999.".
- 00708570 dateCopyrighted "1999.".
- 00708570 description "Includes bibliographical references and index.".
- 00708570 extent "257 p. :".
- 00708570 identifier "0080436110 :".
- 00708570 identifier "0080436110".
- 00708570 identifier 00708570-t.html.
- 00708570 isPartOf "European Materials Research Society symposia proceedings ; v 83".
- 00708570 issued "1999".
- 00708570 issued "1999.".
- 00708570 language "eng".
- 00708570 publisher "Amsterdam ; Oxford : Elsevier,".
- 00708570 subject "621.381 21".
- 00708570 subject "Detectors Congresses.".
- 00708570 subject "Microactuators Congresses.".
- 00708570 subject "Microelectromechanical systems Congresses.".
- 00708570 subject "Microelectronics Congresses.".
- 00708570 subject "TK7874 .S8775 1998".
- 00708570 title "Materials aspects in microsystem technologies : proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998 / edited by D. Barbier ... [et al.].".
- 00708570 type "text".