Matches in Library of Congress for { <http://lccn.loc.gov/00710613> ?p ?o. }
Showing items 1 to 24 of
24
with 100 items per page.
- 00710613 contributor B291455.
- 00710613 contributor B291456.
- 00710613 created "c1999.".
- 00710613 date "1999".
- 00710613 date "c1999.".
- 00710613 dateCopyrighted "c1999.".
- 00710613 description "Includes bibliographical references and index.".
- 00710613 extent "vii, 310 p. :".
- 00710613 identifier "0819434795".
- 00710613 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3882.".
- 00710613 isPartOf "SPIE proceedings series ; v. 3882".
- 00710613 issued "1999".
- 00710613 issued "c1999.".
- 00710613 language "eng".
- 00710613 publisher "Bellingham, Wash., USA : SPIE,".
- 00710613 subject "621.3815 21".
- 00710613 subject "Dielectric films Congresses.".
- 00710613 subject "Integrated circuits Design and construction Congresses.".
- 00710613 subject "Metallizing Congresses.".
- 00710613 subject "Plasma etching Congresses.".
- 00710613 subject "Process control Congresses.".
- 00710613 subject "TK7874 .P79 1999".
- 00710613 title "Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California / Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.].".
- 00710613 type "text".