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- 00710730 alternative "Extreme ultraviolet, X-ray, and neutron optics and sources".
- 00710730 contributor B291592.
- 00710730 contributor B291593.
- 00710730 created "c1999.".
- 00710730 date "1999".
- 00710730 date "c1999.".
- 00710730 dateCopyrighted "c1999.".
- 00710730 description "Includes bibliographical references and index.".
- 00710730 extent "x, 394 p. :".
- 00710730 identifier "0819432539".
- 00710730 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3767.".
- 00710730 isPartOf "SPIE proceedings series ; v. 3767".
- 00710730 issued "1999".
- 00710730 issued "c1999.".
- 00710730 language "eng".
- 00710730 publisher "Bellingham, Wash., USA : SPIE,".
- 00710730 subject "621.36 21".
- 00710730 subject "Extreme ultraviolet lithography. Congresses.".
- 00710730 subject "Ion beam lithography Congresses.".
- 00710730 subject "Lithography, Electron beam Congresses.".
- 00710730 subject "Neutron sources Congresses.".
- 00710730 subject "TA1775 .E88 1999".
- 00710730 subject "X-ray optics Congresses.".
- 00710730 title "EUV, X-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado / Carolyn A. MacDonald ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 00710730 title "Extreme ultraviolet, X-ray, and neutron optics and sources".
- 00710730 type "text".