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- 00711993 contributor B293016.
- 00711993 contributor B293017.
- 00711993 created "c2000.".
- 00711993 date "2000".
- 00711993 date "c2000.".
- 00711993 dateCopyrighted "c2000.".
- 00711993 description "Includes bibliographic references and author index.".
- 00711993 extent "2 v. :".
- 00711993 identifier "0819436186".
- 00711993 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4000.".
- 00711993 isPartOf "SPIE proceedings series ; v. 4000".
- 00711993 issued "2000".
- 00711993 issued "c2000.".
- 00711993 language "eng".
- 00711993 publisher "Bellingham, Washington : SPIE,".
- 00711993 subject "621.3815/31 21".
- 00711993 subject "Integrated circuits Masks Congresses.".
- 00711993 subject "Manufacturing processes Congresses.".
- 00711993 subject "Microlithography Congresses.".
- 00711993 subject "TK7872.M3 O6824 2000".
- 00711993 subject "X-ray lithography Congresses.".
- 00711993 title "Optical microlithography XIII : 1-3 March, 2000, Santa Clara, [California], USA / Christopher J. Progler, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, International SEMATECH.".
- 00711993 type "text".