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- 2000107659 contributor B8906270.
- 2000107659 contributor B8906271.
- 2000107659 contributor B8906272.
- 2000107659 created "c2000.".
- 2000107659 date "2000".
- 2000107659 date "c2000.".
- 2000107659 dateCopyrighted "c2000.".
- 2000107659 description "Includes bibliographical references and index.".
- 2000107659 extent "viii, 258 p. :".
- 2000107659 identifier "1566772869".
- 2000107659 isPartOf "Proceedings (Electrochemical Society) ; v. 2000-19.".
- 2000107659 isPartOf "Proceedings ; v. 2000-19.".
- 2000107659 issued "2000".
- 2000107659 issued "c2000.".
- 2000107659 language "eng".
- 2000107659 publisher "Pennington, NJ : Electrochemical Society, Inc.,".
- 2000107659 subject "620/.5 22".
- 2000107659 subject "Microelectromechanical systems Congresses.".
- 2000107659 subject "Micromechanics Congresses.".
- 2000107659 subject "Microstructure Congresses.".
- 2000107659 subject "TK7875 .M535 2000".
- 2000107659 title "Microfabricated systems and MEMS V : proceedings of the international symposium / editors, P.J. Hesketh ... [et al.]".
- 2000107659 type "text".