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- 2001020028 contributor B8920640.
- 2001020028 created "c2001".
- 2001020028 date "2001".
- 2001020028 date "c2001".
- 2001020028 dateCopyrighted "c2001".
- 2001020028 description "Includes bibliographical references (p. 189-208) and index.".
- 2001020028 extent "xvii, 214 p. :".
- 2001020028 identifier "0819439959 (softcover)".
- 2001020028 isPartOf "Tutorial texts in optical engineering ; v. TT 47".
- 2001020028 issued "2001".
- 2001020028 issued "c2001".
- 2001020028 language "eng".
- 2001020028 publisher "Bellingham, Wash. : SPIE Press,".
- 2001020028 subject "621.3815/31 21".
- 2001020028 subject "Integrated circuits Design and construction.".
- 2001020028 subject "Microlithography.".
- 2001020028 subject "TK7874 .W647 2001".
- 2001020028 title "Resolution enhancement techniques in optical lithography / Alfred Kwok-Kit Wong.".
- 2001020028 type "text".