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- 2001028403 contributor B8930540.
- 2001028403 created "2001.".
- 2001028403 date "2001".
- 2001028403 date "2001.".
- 2001028403 dateCopyrighted "2001.".
- 2001028403 description "Includes bibliographical references and index.".
- 2001028403 extent "x, 448 p. :".
- 2001028403 identifier "0824703804 (alk. paper)".
- 2001028403 identifier 2001028403-d.html.
- 2001028403 issued "2001".
- 2001028403 issued "2001.".
- 2001028403 language "eng".
- 2001028403 publisher "New York : Marcel Dekker,".
- 2001028403 subject "621.3815/2 21".
- 2001028403 subject "Semiconductors Defects.".
- 2001028403 subject "Semiconductors Design and construction.".
- 2001028403 subject "TK7871.85 .C6175 2001".
- 2001028403 title "Contamination-free manufacturing for semiconductors and other precision products / edited by Robert P. Donovan.".
- 2001028403 type "text".