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- 2001029782 contributor B8932141.
- 2001029782 contributor B8932142.
- 2001029782 created "c2001.".
- 2001029782 date "2001".
- 2001029782 date "c2001.".
- 2001029782 dateCopyrighted "c2001.".
- 2001029782 description "Includes bibliographical references and index.".
- 2001029782 extent "xxiii, 195 p. :".
- 2001029782 identifier "0792373618 (alk. paper)".
- 2001029782 identifier 2001029782-d.html.
- 2001029782 identifier 2001029782-t.html.
- 2001029782 isPartOf "Microsystems (Series) ; v. 7.".
- 2001029782 isPartOf "Microsystems ; v. 7".
- 2001029782 issued "2001".
- 2001029782 issued "c2001.".
- 2001029782 language "eng".
- 2001029782 publisher "Boston : Kluwer Academic Publishers,".
- 2001029782 subject "621.3815/31 21".
- 2001029782 subject "Integrated circuits Design and construction.".
- 2001029782 subject "Microlithography.".
- 2001029782 subject "Scanning probe microscopy.".
- 2001029782 subject "TK7874 .S648 2001".
- 2001029782 title "Scanning probe lithography / by Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate.".
- 2001029782 type "text".