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- 2001030693 contributor B8933231.
- 2001030693 created "c2001.".
- 2001030693 date "2001".
- 2001030693 date "c2001.".
- 2001030693 dateCopyrighted "c2001.".
- 2001030693 description "Includes bibliographical references and indexes.".
- 2001030693 extent "1 v. (various pagings) :".
- 2001030693 identifier "1558995218".
- 2001030693 identifier 2001030693-d.html.
- 2001030693 isPartOf "Materials Research Society symposia proceedings ; v. 613.".
- 2001030693 isPartOf "Materials Research Society symposium proceedings ; v. 613".
- 2001030693 issued "2001".
- 2001030693 issued "c2001.".
- 2001030693 language "eng".
- 2001030693 publisher "Warrendale, Pa. : Materials Research Society,".
- 2001030693 subject "671.7/2 21".
- 2001030693 subject "Chemical mechanical planarization Congresses.".
- 2001030693 subject "Electrolytic polishing Congresses.".
- 2001030693 subject "Grinding and polishing Congresses.".
- 2001030693 subject "TS654.5 .C46 2000".
- 2001030693 title "Chemical-Mechanical Polishing 2000 : fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. / editors, Rajiv K. Singh ... [et al.].".
- 2001030693 type "text".