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- 2001043273 contributor B8947810.
- 2001043273 created "c2002.".
- 2001043273 date "2002".
- 2001043273 date "c2002.".
- 2001043273 dateCopyrighted "c2002.".
- 2001043273 description "Includes bibliographical references and index.".
- 2001043273 extent "723 p. :".
- 2001043273 identifier "0849308267 (alk. paper)".
- 2001043273 identifier 2001043273-d.html.
- 2001043273 issued "2002".
- 2001043273 issued "c2002.".
- 2001043273 language "eng".
- 2001043273 publisher "Boca Raton : CRC Press,".
- 2001043273 subject "621.3815/2 21".
- 2001043273 subject "Integrated circuits Design and construction.".
- 2001043273 subject "Lasers Industrial applications.".
- 2001043273 subject "Machining.".
- 2001043273 subject "Microelectromechanical systems Design and construction.".
- 2001043273 subject "Microelectronic packaging.".
- 2001043273 subject "Microelectronics.".
- 2001043273 subject "TK7836 .M33 2002".
- 2001043273 title "Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou.".
- 2001043273 type "text".