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- 2001044289 contributor B8949002.
- 2001044289 created "c2001.".
- 2001044289 date "2001".
- 2001044289 date "c2001.".
- 2001044289 dateCopyrighted "c2001.".
- 2001044289 description "Includes bibliographical references and indexes.".
- 2001044289 extent "1 v. (various pagings) :".
- 2001044289 identifier "1558995676".
- 2001044289 identifier 2001044289-d.html.
- 2001044289 identifier 2001044289.html.
- 2001044289 isPartOf "Materials Research Society symposia proceedings ; v. 657.".
- 2001044289 isPartOf "Materials Research Society symposium proceedings ; v. 657".
- 2001044289 issued "2001".
- 2001044289 issued "c2001.".
- 2001044289 language "eng".
- 2001044289 publisher "Warrendale, Pa. : Materials Research Society,".
- 2001044289 subject "621.381 21".
- 2001044289 subject "Microelectromechanical systems Materials Congresses.".
- 2001044289 subject "TK7875 .M38 2001".
- 2001044289 title "Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. / editors, Harold Kahn ... [et al.].".
- 2001044289 type "text".