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- 2001044737 contributor B8949553.
- 2001044737 created "c2002.".
- 2001044737 date "2002".
- 2001044737 date "c2002.".
- 2001044737 dateCopyrighted "c2002.".
- 2001044737 description "Includes bibliographical references (p. 427-431) and index.".
- 2001044737 extent "xii, 436 p. :".
- 2001044737 identifier "0072393912 (alk. paper)".
- 2001044737 identifier 2001044737.html.
- 2001044737 identifier 2001044737.html.
- 2001044737 issued "2002".
- 2001044737 issued "c2002.".
- 2001044737 language "eng".
- 2001044737 publisher "Boston : McGraw-Hill,".
- 2001044737 subject "621.381 21".
- 2001044737 subject "Microelectromechanical systems.".
- 2001044737 subject "Microelectronic packaging.".
- 2001044737 subject "Microelectronics.".
- 2001044737 subject "TK7874 .H794 2002".
- 2001044737 title "MEMS and microsystems : design and manufacture / Tai-Ran Hsu.".
- 2001044737 type "text".