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- 2001049944 contributor B8955564.
- 2001049944 created "c2002.".
- 2001049944 date "2002".
- 2001049944 date "c2002.".
- 2001049944 dateCopyrighted "c2002.".
- 2001049944 description "Includes bibliographical references and index.".
- 2001049944 extent "461 p. :".
- 2001049944 identifier "0849312620 (alk. paper)".
- 2001049944 identifier 2001049944-d.html.
- 2001049944 isPartOf "Nano- and microscience, engineering, technology, and medicine series".
- 2001049944 issued "2002".
- 2001049944 issued "c2002.".
- 2001049944 language "eng".
- 2001049944 publisher "Boca Raton, Fla. : CRC Press,".
- 2001049944 subject "621.381 21".
- 2001049944 subject "Microelectromechanical systems.".
- 2001049944 subject "TK7875 .L9597 2002".
- 2001049944 title "MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski.".
- 2001049944 type "text".