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- 2001086381 contributor B8966104.
- 2001086381 contributor B8966105.
- 2001086381 contributor B8966106.
- 2001086381 created "c2001.".
- 2001086381 date "2001".
- 2001086381 date "c2001.".
- 2001086381 dateCopyrighted "c2001.".
- 2001086381 description "Includes bibliographical references and indexes.".
- 2001086381 extent "viii, 338 p. :".
- 2001086381 identifier "1566772931".
- 2001086381 isPartOf "Proceedings (Electrochemical Society) ; v. 2000-26.".
- 2001086381 isPartOf "Proceedings ; v. 2000-26.".
- 2001086381 issued "2001".
- 2001086381 issued "c2001.".
- 2001086381 language "eng".
- 2001086381 publisher "Pennington, NJ : Electrochemical Society, Inc.,".
- 2001086381 subject "Chemical mechanical planarization Congresses.".
- 2001086381 subject "Grinding and polishing Congresses.".
- 2001086381 subject "Integrated circuits Materials Congresses.".
- 2001086381 subject "Metals Pickling Congresses.".
- 2001086381 subject "Microelectronics Materials Congresses.".
- 2001086381 subject "TK7871 .I586 2000".
- 2001086381 title "Chemical mechanical planarization IV : proceedings of the International Symposium / editors, R.L. Opila ... [et al.]".
- 2001086381 type "text".