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- 2001092104 contributor B8970360.
- 2001092104 contributor B8970361.
- 2001092104 contributor B8970362.
- 2001092104 created "2002.".
- 2001092104 date "2002".
- 2001092104 date "2002.".
- 2001092104 dateCopyrighted "2002.".
- 2001092104 description "Includes bibliographical references and index.".
- 2001092104 extent "xxiv, 725 p. :".
- 2001092104 identifier "0780371550 (pbk.)".
- 2001092104 issued "2002".
- 2001092104 issued "2002.".
- 2001092104 language "eng".
- 2001092104 publisher "Piscataway, NJ : IEEE,".
- 2001092104 subject "621.3815/2 22".
- 2001092104 subject "Ion implantation Congresses.".
- 2001092104 subject "Semiconductor doping Congresses.".
- 2001092104 subject "Semiconductors Congresses.".
- 2001092104 subject "TK7871.85 .I57623 2002".
- 2001092104 title "IIT 2002 proceedings : ion implementation technology : 2002 14th International Conference on Ion Implantation Technology proceedings, Taos, New Mexico, USA, 22-27 September 2002 / editors, Bob Brown ... [et al.].".
- 2001092104 type "text".