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- 2001092446 contributor B8970625.
- 2001092446 contributor B8970626.
- 2001092446 contributor B8970627.
- 2001092446 created "c2001.".
- 2001092446 date "2001".
- 2001092446 date "c2001.".
- 2001092446 dateCopyrighted "c2001.".
- 2001092446 description "Includes bibliographical references and index.".
- 2001092446 extent "x, 286 p. :".
- 2001092446 identifier "156677313X".
- 2001092446 isPartOf "Proceedings (Electrochemical Society) ; v. 2001-7.".
- 2001092446 isPartOf "Proceedings ; v. 2001-7".
- 2001092446 issued "2001".
- 2001092446 issued "c2001.".
- 2001092446 language "eng".
- 2001092446 publisher "Pennington, NJ : Electrochemical Society,".
- 2001092446 subject "621.3815/2 22".
- 2001092446 subject "Silicon dioxide Congresses.".
- 2001092446 subject "Silicon nitride Congresses.".
- 2001092446 subject "TK7872.T55 S54 2001".
- 2001092446 subject "Thin film devices Congresses.".
- 2001092446 title "Silicon nitride and silicon dioxide thin insulating films : proceedings of the sixth international symposium / editors, K.B. Sundaram ... [et al.].".
- 2001092446 type "text".