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- 2001094657 contributor B8972278.
- 2001094657 contributor B8972279.
- 2001094657 created "c2002.".
- 2001094657 date "2002".
- 2001094657 date "c2002.".
- 2001094657 dateCopyrighted "c2002.".
- 2001094657 description "Includes bibliographical references and index.".
- 2001094657 extent "vii, 116 p. :".
- 2001094657 identifier "0780372247 (softbound edition)".
- 2001094657 issued "2002".
- 2001094657 issued "c2002.".
- 2001094657 language "eng".
- 2001094657 publisher "New York City : IEEE,".
- 2001094657 subject "621.381 21".
- 2001094657 subject "Microelectromechanical systems Congresses.".
- 2001094657 subject "TK7875 .M452 2001".
- 2001094657 title "2001 Microelectromechanical Systems Conference : MEMS 2001 : 24-26 August 2001, Berkeley, California, USA / technical co-sponsorship by IEEE Circuits and Systems Society.".
- 2001094657 type "text".