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- 2001266844 contributor B8982288.
- 2001266844 contributor B8982289.
- 2001266844 created "c2000.".
- 2001266844 date "2000".
- 2001266844 date "c2000.".
- 2001266844 dateCopyrighted "c2000.".
- 2001266844 description "Includes bibliographic references and author index.".
- 2001266844 extent "xi, 514 p. :".
- 2001266844 identifier "0819435503".
- 2001266844 isPartOf "Proceedings of SPIE ; v. 3933".
- 2001266844 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3933.".
- 2001266844 issued "2000".
- 2001266844 issued "c2000.".
- 2001266844 language "eng".
- 2001266844 publisher "Bellingham, Washington : SPIE,".
- 2001266844 subject "621.381 21".
- 2001266844 subject "Laser ablation Congresses.".
- 2001266844 subject "Lasers Industrial applications Congresses.".
- 2001266844 subject "Manufacturing processes Congresses.".
- 2001266844 subject "Microelectronics industry Equipment and supplies Congresses.".
- 2001266844 subject "Optoelectronic devices Design and construction Congresses.".
- 2001266844 subject "TK7836 .L383 2000".
- 2001266844 title "Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA / Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering.".
- 2001266844 type "text".