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- 2001267485 alternative "Microoptoelectromechanical systems and miniaturized systems".
- 2001267485 contributor B8983149.
- 2001267485 contributor B8983150.
- 2001267485 created "c2000.".
- 2001267485 date "2000".
- 2001267485 date "c2000.".
- 2001267485 dateCopyrighted "c2000.".
- 2001267485 description "Includes bibliographical references and index.".
- 2001267485 extent "viii, 412 p. :".
- 2001267485 identifier "0819438340".
- 2001267485 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4178.".
- 2001267485 isPartOf "SPIE proceedings series ; v. 4178".
- 2001267485 issued "2000".
- 2001267485 issued "c2000.".
- 2001267485 language "eng".
- 2001267485 publisher "Bellingham, Wash., USA : SPIE,".
- 2001267485 subject "621.381 21".
- 2001267485 subject "Microelectromechanical systems Congresses.".
- 2001267485 subject "Micromechanics Congresses.".
- 2001267485 subject "Miniature electronic equipment Congresses.".
- 2001267485 subject "Optoelectronic devices Congresses.".
- 2001267485 subject "TK7874 .M53255 2000".
- 2001267485 title "MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA / M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA).".
- 2001267485 title "Microoptoelectromechanical systems and miniaturized systems".
- 2001267485 type "text".