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- 2001267486 contributor B8983151.
- 2001267486 contributor B8983152.
- 2001267486 created "c2000.".
- 2001267486 date "2000".
- 2001267486 date "c2000.".
- 2001267486 dateCopyrighted "c2000.".
- 2001267486 description "Includes bibliographical references and index.".
- 2001267486 extent "v, 180 p. :".
- 2001267486 identifier "0819438359".
- 2001267486 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4179.".
- 2001267486 isPartOf "SPIE proceedings series ; v. 4179".
- 2001267486 issued "2000".
- 2001267486 issued "c2000.".
- 2001267486 language "eng".
- 2001267486 publisher "Bellingham, Wash., USA : SPIE,".
- 2001267486 subject "621.381/045 21".
- 2001267486 subject "Integrated optics Congresses.".
- 2001267486 subject "Microelectromechanical systems Congresses.".
- 2001267486 subject "Miniature electronic equipment Industrial applications Congresses.".
- 2001267486 subject "Optoelectronic devices Industrial applications Congresses.".
- 2001267486 subject "TA1660 .M534 2000".
- 2001267486 title "Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA / Sing H. Lee, Eric G. Johnson, chairs/editors ; sponsored by SPIE-the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).".
- 2001267486 type "text".