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- 2001267487 contributor B8983153.
- 2001267487 contributor B8983154.
- 2001267487 created "c2000.".
- 2001267487 date "2000".
- 2001267487 date "c2000.".
- 2001267487 dateCopyrighted "c2000.".
- 2001267487 description "Includes bibliographical references and index.".
- 2001267487 extent "x, 524 p. :".
- 2001267487 identifier "0819438308".
- 2001267487 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4174.".
- 2001267487 isPartOf "SPIE proceedings series ; v. 4174".
- 2001267487 issued "2000".
- 2001267487 issued "c2000.".
- 2001267487 language "eng".
- 2001267487 publisher "Bellingham, Wash., USA : SPIE,".
- 2001267487 subject "621.3815/2 21".
- 2001267487 subject "Electromechanical devices Design and construction Congresses.".
- 2001267487 subject "Microfabrication Congresses.".
- 2001267487 subject "Micromachining Congresses.".
- 2001267487 subject "TJ1191.5 .M55243 2000".
- 2001267487 title "Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA / Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).".
- 2001267487 type "text".