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- 2001267594 contributor B8983318.
- 2001267594 created "c2000.".
- 2001267594 date "2000".
- 2001267594 date "c2000.".
- 2001267594 dateCopyrighted "c2000.".
- 2001267594 extent "xv, 596 p. :".
- 2001267594 identifier "0819436453".
- 2001267594 isPartOf "Proceedings ; v. 4019".
- 2001267594 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4019.".
- 2001267594 issued "2000".
- 2001267594 issued "c2000.".
- 2001267594 language "eng".
- 2001267594 publisher "Bellingham, Wash. : SPIE--the International Society for Optical Engineering,".
- 2001267594 subject "621.381 21".
- 2001267594 subject "Microelectromechanical systems Congresses.".
- 2001267594 subject "Microelectronic packaging Congresses.".
- 2001267594 subject "Micromachining Congresses.".
- 2001267594 subject "Optoelectronic devices Congresses.".
- 2001267594 subject "TK7875 .D47 2000".
- 2001267594 title "Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France / Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.].".
- 2001267594 type "text".