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- 2001273002 alternative "Plasma Process-Induced Damage, 2000 5th International Symposium on.".
- 2001273002 alternative "P²ID".
- 2001273002 contributor B8990118.
- 2001273002 contributor B8990119.
- 2001273002 contributor B8990120.
- 2001273002 created "c2000.".
- 2001273002 date "2000".
- 2001273002 date "c2000.".
- 2001273002 dateCopyrighted "c2000.".
- 2001273002 description "Includes bibliographical references and author index.".
- 2001273002 extent "[6], i, 172 p. :".
- 2001273002 identifier "0965157741".
- 2001273002 issued "2000".
- 2001273002 issued "c2000.".
- 2001273002 language "eng".
- 2001273002 publisher "Santa Clara, California : Northern California Chapter of the American Vacuum Society,".
- 2001273002 subject "621.3815/2 21".
- 2001273002 subject "Plasma radiation Congresses.".
- 2001273002 subject "Semiconductor wafers Congresses.".
- 2001273002 subject "Semiconductors Effect of radiation on Congresses.".
- 2001273002 subject "TK7871.85 .I5834 2000".
- 2001273002 title "2000 5th International Symposium on Plasma Process-Induced Damage : May 22-24, 2000, Santa Clara, California, USA / Mitsumasa Koyanagi, Manfred Englehardt, and Calvin T. Gabriel, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron devices Society, Japanese Society of Applied Physics.".
- 2001273002 title "P²ID".
- 2001273002 type "text".