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- 2001273204 contributor B8990372.
- 2001273204 contributor B8990373.
- 2001273204 created "c2000.".
- 2001273204 date "2000".
- 2001273204 date "c2000.".
- 2001273204 dateCopyrighted "c2000.".
- 2001273204 description "Includes bibliographical references and index.".
- 2001273204 extent "xix, 212 p. :".
- 2001273204 identifier "0819438995".
- 2001273204 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4227.".
- 2001273204 isPartOf "SPIE proceedings series ; v. 4227".
- 2001273204 issued "2000".
- 2001273204 issued "c2000.".
- 2001273204 language "eng".
- 2001273204 publisher "Bellingham, Wash. : SPIE,".
- 2001273204 subject "621.3815/2 21".
- 2001273204 subject "Epitaxy Congresses.".
- 2001273204 subject "Integrated circuits Design and construction Congresses.".
- 2001273204 subject "Semiconductor wafers Congresses.".
- 2001273204 subject "Semiconductors Characterization Congresses.".
- 2001273204 subject "TK7871.85 .A3484 2000".
- 2001273204 title "Advanced microelectronic processing techniques : 28-30 November 2000, Singapore / H. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.].".
- 2001273204 type "text".