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- 2001274449 alternative "Microelectromechanical systems reliability for critical applications".
- 2001274449 contributor B8991975.
- 2001274449 created "c2000.".
- 2001274449 date "2000".
- 2001274449 date "c2000.".
- 2001274449 dateCopyrighted "c2000.".
- 2001274449 description "Includes bibliographical references and index.".
- 2001274449 extent "v, 146 p. :".
- 2001274449 identifier "0819438367".
- 2001274449 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4180.".
- 2001274449 isPartOf "SPIE proceedings series, 0277-786X ; v. 4180".
- 2001274449 issued "2000".
- 2001274449 issued "c2000.".
- 2001274449 language "eng".
- 2001274449 publisher "Bellingham, Wash., USA : SPIE,".
- 2001274449 subject "621.31/042 21".
- 2001274449 subject "Microelectromechanical systems Reliability Congresses.".
- 2001274449 subject "TK7875 .M47 2000".
- 2001274449 title "MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA / Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).".
- 2001274449 title "Microelectromechanical systems reliability for critical applications".
- 2001274449 type "text".