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- 2001277535 contributor B8995660.
- 2001277535 contributor B8995661.
- 2001277535 created "c2000.".
- 2001277535 date "2000".
- 2001277535 date "c2000.".
- 2001277535 dateCopyrighted "c2000.".
- 2001277535 description "Includes bibliographical references and index.".
- 2001277535 extent "xv, 194 p. :".
- 2001277535 identifier "0819438987".
- 2001277535 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4226.".
- 2001277535 isPartOf "SPIE proceedings series ; v. 4226".
- 2001277535 issued "2000".
- 2001277535 issued "c2000.".
- 2001277535 language "eng".
- 2001277535 publisher "Bellingham, Wash., USA : SPIE,".
- 2001277535 subject "621.3815 21".
- 2001277535 subject "Integrated circuits Design and construction Congresses.".
- 2001277535 subject "Integrated circuits Inspection Congresses.".
- 2001277535 subject "Microlithography Industrial applications Congresses.".
- 2001277535 subject "Process control Congresses.".
- 2001277535 subject "TK7874 .M48744 2000".
- 2001277535 title "Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore / Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.].".
- 2001277535 type "text".