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- 2001277714 alternative "Smart electronics and MEMS".
- 2001277714 contributor B8995891.
- 2001277714 contributor B8995892.
- 2001277714 created "c2001.".
- 2001277714 date "2001".
- 2001277714 date "c2001.".
- 2001277714 dateCopyrighted "c2001.".
- 2001277714 description "Includes bibliographic references and index.".
- 2001277714 extent "viii, 392 p. :".
- 2001277714 identifier "0819440205".
- 2001277714 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4334.".
- 2001277714 isPartOf "SPIE proceedings series ; v. 4334".
- 2001277714 issued "2001".
- 2001277714 issued "c2001.".
- 2001277714 language "eng".
- 2001277714 publisher "Bellingham, Washington : SPIE,".
- 2001277714 subject "621.381 21".
- 2001277714 subject "Actuators Congresses.".
- 2001277714 subject "Microelectromechanical systems Congresses.".
- 2001277714 subject "Microelectronics Materials Congresses.".
- 2001277714 subject "Smart materials Congresses.".
- 2001277714 subject "TK7874 .S593 2001".
- 2001277714 title "Smart electronics and MEMS".
- 2001277714 title "Smart structures and materials 2001. Smart electronics and MEMS : 5-7 March 2001, Newport Beach, USA / Vijay K. Varadan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by ASME--American Society for Mechanical Engineers ... [et al.] ; cooperating organizations, Air Force Research Laboratory ... [et al.].".
- 2001277714 type "text".