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- 2001466475 contributor B9165264.
- 2001466475 created "2001.".
- 2001466475 date "2001".
- 2001466475 date "2001.".
- 2001466475 dateCopyrighted "2001.".
- 2001466475 description "Includes bibliographical references (p. 131-138).".
- 2001466475 description "Originally presented as the author's thesis (Swiss Federal Institute of Technology), Diss. ETH No. 14220.".
- 2001466475 extent "xi, 139 p. :".
- 2001466475 identifier "3896497049".
- 2001466475 isPartOf "Series in microelectronics, 0936-5362 ; v. 117".
- 2001466475 issued "2001".
- 2001466475 issued "2001.".
- 2001466475 language "Summary in German.".
- 2001466475 language "eng ger".
- 2001466475 language "eng".
- 2001466475 publisher "Konstanz : Hartung-Gorre,".
- 2001466475 subject "621.3815/2 22".
- 2001466475 subject "Semiconductors Design and construction Computer simulation.".
- 2001466475 subject "TK7871.85 .Z48 2001".
- 2001466475 title "Stress-related problems in process simulation / Stefan Zelenka.".
- 2001466475 type "text".