Matches in Library of Congress for { <http://lccn.loc.gov/2002031635> ?p ?o. }
Showing items 1 to 23 of
23
with 100 items per page.
- 2002031635 alternative "Materials and process integration for MEMS".
- 2002031635 contributor B9225378.
- 2002031635 created "c2002.".
- 2002031635 date "2002".
- 2002031635 date "c2002.".
- 2002031635 dateCopyrighted "c2002.".
- 2002031635 description "Includes bibliographical references and index.".
- 2002031635 extent "xix, 299 p. :".
- 2002031635 identifier "1402071752 (alk. paper)".
- 2002031635 identifier 2002031635-d.html.
- 2002031635 identifier 2002031635.html.
- 2002031635 isPartOf "Microsystems (Series) ; v. 9.".
- 2002031635 isPartOf "Microsystems ; v. 9".
- 2002031635 issued "2002".
- 2002031635 issued "c2002.".
- 2002031635 language "eng".
- 2002031635 publisher "Boston : Kluwer Academic Publishers,".
- 2002031635 subject "621.381 21".
- 2002031635 subject "Microelectromechanical systems.".
- 2002031635 subject "TK7875 .M373 2002".
- 2002031635 title "Materials & process integration for MEMS / edited by Francis E.H. Tay.".
- 2002031635 title "Materials and process integration for MEMS".
- 2002031635 type "text".