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- 2002035706 contributor B9229428.
- 2002035706 created "c2003.".
- 2002035706 date "2003".
- 2002035706 date "c2003.".
- 2002035706 dateCopyrighted "c2003.".
- 2002035706 description "Includes bibliographical references (p. [133]-139).".
- 2002035706 extent "xvi, 139 p. :".
- 2002035706 identifier "1402073127 (alk. paper)".
- 2002035706 identifier 2002035706-d.html.
- 2002035706 identifier 2002035706-t.html.
- 2002035706 isPartOf "The Kluwer international series in microsystems".
- 2002035706 issued "2003".
- 2002035706 issued "c2003.".
- 2002035706 language "eng".
- 2002035706 publisher "Boston : Kluwer Academic Publishers,".
- 2002035706 subject "681/.428 21".
- 2002035706 subject "Micromachining.".
- 2002035706 subject "Mirrors.".
- 2002035706 subject "Optical instruments Design and construction.".
- 2002035706 subject "TJ1191.5 .C665 2003".
- 2002035706 title "Micromachined mirrors / by Robert Conant.".
- 2002035706 type "text".