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- 2002040665 alternative "Principles of plasma processing".
- 2002040665 contributor B9231979.
- 2002040665 contributor B9231980.
- 2002040665 created "2003.".
- 2002040665 date "2003".
- 2002040665 date "2003.".
- 2002040665 dateCopyrighted "2003.".
- 2002040665 extent "ix, 208 p. :".
- 2002040665 identifier "0306474972".
- 2002040665 identifier 2002040665-d.html.
- 2002040665 identifier 2002040665-t.html.
- 2002040665 issued "2003".
- 2002040665 issued "2003.".
- 2002040665 language "eng".
- 2002040665 publisher "New York : Kluwer Academic/Plenum Publishers,".
- 2002040665 subject "621.044 21".
- 2002040665 subject "Plasma chemistry.".
- 2002040665 subject "Plasma dynamics.".
- 2002040665 subject "Plasma engineering.".
- 2002040665 subject "TA2020 .C454 2003".
- 2002040665 title "Lecture notes on principles of plasma processing / Francis F. Chen and Jane P. Chang.".
- 2002040665 title "Principles of plasma processing".
- 2002040665 type "text".