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- 2002066982 contributor B9236907.
- 2002066982 created "c2003.".
- 2002066982 date "2003".
- 2002066982 date "c2003.".
- 2002066982 dateCopyrighted "c2003.".
- 2002066982 description "Includes bibliographical references and index.".
- 2002066982 extent "xix, 309 p. :".
- 2002066982 identifier "3540678190 (alk. paper)".
- 2002066982 identifier 2002066982-d.html.
- 2002066982 identifier 2002066982-t.html.
- 2002066982 isPartOf "Springer series in advanced microelectronics, 1437-0387 ; 9".
- 2002066982 issued "2003".
- 2002066982 issued "c2003.".
- 2002066982 language "eng".
- 2002066982 publisher "Berlin ; New York : Springer,".
- 2002066982 subject "621.3815 21".
- 2002066982 subject "Dielectrics.".
- 2002066982 subject "Electric insulators and insulation.".
- 2002066982 subject "Integrated circuits.".
- 2002066982 subject "TK3401 .L69 2003".
- 2002066982 title "Low dielectric constant materials for IC applications / P.S. Ho, J. Leu, W.W. Lee (eds.).".
- 2002066982 type "text".